| 摘要 |
<p>PURPOSE:To prevent damage to a wafer cassette, and diminish dispersion in process by providing a wafer handling arm, for semiconductor manufacturing apparatus, involving a high temperature process, with a temperature measurement function. CONSTITUTION:A temperature sensor 2, associated with a spring 3 for closely fitting the sensor 2 with a wafer, is built in a wafer holding part 1a.</p> |
