SILICON NITRIDE FILM,申请号JP19910318688-传众专利搜索

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发明名称	SILICON NITRIDE FILM
摘要
申请公布号	JPH05129288(A)	申请公布日期	1993.05.25
申请号	JP19910318688	申请日期	1991.11.07
申请人	CASIO COMPUT CO LTD	发明人	AZUMA TOSHIAKI
分类号	C23C16/34;H01L21/318	主分类号	C23C16/34
代理机构		代理人
主权项
地址

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