FOREIGN MATTER DETECTION METHOD AND DEVICE,申请号JP19910286147-传众专利搜索

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发明名称	FOREIGN MATTER DETECTION METHOD AND DEVICE
摘要
申请公布号	JPH05129397(A)	申请公布日期	1993.05.25
申请号	JP19910286147	申请日期	1991.10.31
申请人	HITACHI LTD	发明人	AKIYAMA NOBUYUKI
分类号	G01N21/88;G01N21/94;G01N21/956;G06K9/62;H01L21/66	主分类号	G01N21/88
代理机构		代理人
主权项
地址

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