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发明名称
HEAT TREATMENT METHOD OF SILICON WAFER
摘要
申请公布号
JPH05129310(A)
申请公布日期
1993.05.25
申请号
JP19910276778
申请日期
1991.09.28
申请人
SHIN ETSU HANDOTAI CO LTD
发明人
HAYAMIZU YOSHINORI;USHIO SATOSHI;TAKENAKA TAKUO
分类号
H01L21/322
主分类号
H01L21/322
代理机构
代理人
主权项
地址
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