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发明名称
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
摘要
申请公布号
KR930004116(B1)
申请公布日期
1993.05.20
申请号
KR19890018050
申请日期
1989.12.06
申请人
MITSUBISHI ELECTRIC CORP.
发明人
TAKADA, YOSHIBUMI
分类号
H01L21/302;(IPC1-7):H01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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