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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH05121485(A)
申请公布日期
1993.05.18
申请号
JP19910277926
申请日期
1991.10.24
申请人
TOSHIBA CORP
发明人
TAZAWA HIROSHI;TAKUBO TOMOAKI;SASAKI MAMORU
分类号
H01L21/60;H01L23/34;H01L23/50
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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