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发明名称
ULTRASONIC CLEANING EQUIPMENT
摘要
申请公布号
JPH05109685(A)
申请公布日期
1993.04.30
申请号
JP19910266238
申请日期
1991.10.15
申请人
TOSHIBA CORP
发明人
NAGAHARA YOSHIYUKI
分类号
B08B3/12;B23H9/00;H01L21/304
主分类号
B08B3/12
代理机构
代理人
主权项
地址
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