| 摘要 |
PURPOSE:To remarkably reduce the projection of substrate surface and to assure high reliability for the disc unit, by the burnish finish of the substrate surface with the floating burnish head constituted with hard material. CONSTITUTION:The slider 21 as the polishing part formed by incorporated processing of hard material such as sapphire is located at the tip of the gimbal spring 22 for attitude adjustment. The floating burnish head 2 is provided so that the shaper is floated on the surface of the substrate 1 turning with a given gap. Further, the projection present on the surface of the substrate 1 is detected with the floating head 3 and the stress due to strain induced to the head 3 by the collision of projection is converted into electric signal with the sensor 4. By using the floating burnish head 2, the surface of base is finished to burnish. Thus, the polishing of medium surface can be made easy, and the high reliability of disc can be assured. |
