| 摘要 |
<p>A miniature cryosorption vaccum pump (7) capable of producing intermediate vacuums on the order of about 10?-2 to 10-4¿ torr is provided which includes a closed cycle Stirling cycle refrigerator. The overall weight of the miniature cryosorption vacuum pump (7) (including the refrigerator) is less than about 2.5 kg, making the miniature cryosorption vacuum pump particularly suitable for portable or field use. The miniature cryosorption vacuum pump may be used as a roughing pump in various applications which require intermediate vacuum rough pumping or as a high vacuum pump where low pumping rates are required at pressures down to 5X10-5 torr.</p> |
