Scanner for scanning probe microscopes having reduced Z-axis non-linearity

摘要

This invention relates to Scanning Probe Microscopes (SPMs) and the like that use piezoelectric type scanners. The scanner described herein limits non-linear errors in the vertical scan direction while maintaining a large horizontal scan size. A tube scanner is shown wherein the tube comprises two portions. The first tube has first (x,y) electrodes attached thereto and is of a first piezoelectric material having high sensitivity qualities in response to voltages applied to the first electrodes. The second tube has second (z) elecrodes attached thereto and is of a second piezoelectric material having sensitivity qualities in response to voltages applied to the second electrodes which are lower than those of the first piezoelectric material. In one embodiment, the first tube and the second tube have substantially identical diameters and are attached to each other in end-to-end concentric relationship. In another embodiment, the first tube and the second tube have different diameters and are connected to each other in end-to-end concentric relationship with the second tube associated with z motion having a smaller diameter and being disposed within the first tube associated with x and y motion. To achieve preferred results, the second tube associated with z motion has thinner sidewalls than the first tube.