发明名称 Electroformed method for fabricating round mesa millimeter wave waffleline structure
摘要 A method for manufacturing a Waffleline structure includes making holes in predetermined array pattern through a substrate material sheet, depositing layers of materials on the sheet until the holes are filled, machining the layers off a first side of the sheet to expose the substrate material, and etching the substrate material away, leavign a Waffleline structure having an array of mesas of the layers of material disposed on a base of the layers of material. The method may additionally include applying a mask to the first side of the sheet after the step of machining, and depositing further layers of material on a second side of the sheet opposite the first side following the step of applying the mask. The method may additionally comprise the steps of vapor blasting, chemically cleaning, or brushing the Waffleline structure following the step of etching.
申请公布号 US5192588(A) 申请公布日期 1993.03.09
申请号 US19910665263 申请日期 1991.03.05
申请人 HARRIS CORPORATION 发明人 DISTEFANO, RALPH D.
分类号 H01L21/00 主分类号 H01L21/00
代理机构 代理人
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