TURBOMOLEKULARPUMPE UND DEREN BETRIEBSVERFAHREN.,申请号DE1989601986T-传众专利搜索

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发明名称	TURBOMOLEKULARPUMPE UND DEREN BETRIEBSVERFAHREN.
摘要
申请公布号	DE68901986(T2)	申请公布日期	1993.03.04
申请号	DE1989601986T	申请日期	1989.03.06
申请人	KABUSHIKI KAISHA TOSHIBA, KAWASAKI, KANAGAWA, JP;EBARA CORP., TOKIO/TOKYO, JP	发明人	OKUMURA, KATSUYA;KURIYAMA, FUMIO, YOKOHAMA-SHI KANAGAWA-KEN, JP;MURAI, YUKIO, FUJISAWA-SHI KANAGAWA-KEN, JP;TSUJIMURA, MANABU;SOBUKAWA, HIROSHI, YOKOHAMA-SHI KANAGAWA-KEN, JP
分类号	F04B37/06;F04D19/04;(IPC1-7):F04D19/04	主分类号	F04B37/06
代理机构		代理人
主权项
地址

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