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发明名称
摘要
申请公布号	JPH0516399(B2)	申请公布日期	1993.03.04
申请号	JP19880077798	申请日期	1988.03.30
申请人	ROHM KK	发明人	TANAKA HARUO;MUSHIGAMI MASAHITO;ISHIDA JUJI
分类号	H01L21/203;C30B23/08	主分类号	H01L21/203
代理机构		代理人
主权项
地址

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