| 摘要 |
PURPOSE:To obtain a pattern having high sensitivity, and excellent resolution, developing property, heat resistance and resist shapes by incorporating a quinone diazide compd. and specified flavonoid or bio-flavonoid compd. CONSTITUTION:This resist compsn. contains an alkali-soluble resin, quinone diazide compd. and at least one compd. selected from flavonoid or bio-flavonoid compds. expressed by formulae I-IV. In formulae I-IV, X is -C(=O)- or -C(R4, R5)-, R1-R7 are s or different hydrogen atom, hydroxyl group or alkyl group, however, at least one of R1-R5 is hydroxyl group and one of R6 and R7 is hydroxyl group, (m) and (n) are integers 1-3 satisfying m+n<=6. The flavonoid or bio-flavonoid compds. expressed by formulae I-IV exist in natural matter or can be obtd. by hydrolysis of glycosides of these. |
