| 摘要 |
PURPOSE:To suppress the side lobe level in the shorter axis direction by forming an electrode for each array element of one main plate of a piezoelectric element plate in an array shaped arrangement so that the area is larger at the center and reduced toward the edge part and dividing a vibration plate and the conductor layer of the other main plate divided by a plurality of grooves, into an array form in the arrangement direction. CONSTITUTION:The shape of an electrode 5 corresponding to each array element 4 of an array contactor element on one main plane 1 of a piezoelectric vibrator plate 3 is formed so that the area is larger at the center of the vibrator plate 3 in the shorter axis direction T of the array and is reduced toward the edge part, and weighting is performed in the shorter axis direction T. Further, a plurality of grooves 6 are formed in parallel to the arrangement direction S towards the main plane 1 from the other main plane 2, and the mechanical joint between the fine piezoelectric elements 13 in the shorter axis direction T is eliminated. Further, a conduct layer 7 is formed on the main plane 2, and the electric potential of the piezoelectric element 13 is made uniform, and the conductor layer 7 is used as the grounding of the vibrator plate 3, and the vibrator element plate 3 is array-divided in the arrangement direction S. Accordingly, the contactor can be manufactured easily and surely, and the side lobe level in the shorter axis direction can be suppressed. |
