发明名称 ERROR CORRECTING CIRCUIT
摘要 PURPOSE:To sharply improve ionization efficiency and ion selectivity by exciting a substance to be ionized to a comparatively lower exciting condition through gasdischarge, resonant light exciting the Rydberg condition through irradiation of laser beam and to the ion condition through application of electric field. CONSTITUTION:The beryllium vapor 10 is supplied to a vessel 1 from a gas discharge hole 1a. The RF discharge is generated by an induction coil 16, simultaneously a laser beam generating part oscillates and a voltage is applied to electrodes 5 and 6 in synchronization with laser oscillation. Electrons by RF discharge collide with the beryllium vapor 10, the laser beams B3-B5 cross at the ion producing space 4 within the vessel 1, the beryllium vapor 10 is resonant- excited step by step to the Rydberg condition, and finally the excited vapor is ionized by pulse field generated from a field generating part 15.
申请公布号 JPH0512814(B2) 申请公布日期 1993.02.19
申请号 JP19840093495 申请日期 1984.05.08
申请人 MITSUBISHI ELECTRIC CORP 发明人 UEDA YOSHIHIRO;ONO KOICHI;OOMORI TATSUO;FUJITA SHIGETO
分类号 H01J37/08;H01J27/24;H01J37/32;H01L21/265 主分类号 H01J37/08
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