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发明名称
ROTIERENDE MAGNETRON-KATODE UND VERFAHREN ZUR ANWENDUNG
摘要
申请公布号
DE4126236(A1)
申请公布日期
1993.02.11
申请号
DE19914126236
申请日期
1991.08.08
申请人
LEYBOLD AG, 6450 HANAU, DE
发明人
HAEUSLER, ALFONS, DIPL.-ING., 6053 OBERTSHAUSEN, DE
分类号
C23C14/34;H01J37/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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