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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH0529313(A)
申请公布日期
1993.02.05
申请号
JP19910184577
申请日期
1991.07.24
申请人
MITSUBISHI ELECTRIC CORP
发明人
MATSUMOTO TAKASHI;TSUJIHASHI YOSHIKI;SHINOHARA HIROSHI
分类号
H01L21/3205;H01L23/52
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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