| 发明名称 |
SHORT ARC LAMP IMAGE TRANSFORMER |
| 摘要 |
<p>A light transformer for converting light from a short arc lamp into an arcuate shape of uniform intensity. Mirror means associated with the short arc lamp projects light from the short arc lamp as a plurality of separate images conforming to the desired arcuate shape onto a plurality of reflecting facets also formed in the desired arcuate shape. Light pipe means formed in the desired arcuate shape is disposed at one end to receive light images via the facets and to emit light at the other end in the desired arcuate shape.</p> |
| 申请公布号 |
EP0222318(B1) |
申请公布日期 |
1993.02.03 |
| 申请号 |
EP19860115348 |
申请日期 |
1986.11.05 |
| 申请人 |
SVG LITHOGRAPHY SYSTEMS, INC. |
发明人 |
WU, FREDERICK Y.;MARKLE, DAVID A. |
| 分类号 |
F21V8/00;G02B17/06;G02B27/09;G03F7/20;H01L21/027;H01L21/30 |
主分类号 |
F21V8/00 |
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