PRODUCTION OF ALUMINUM NITRIDE SINTERED BODY

摘要

PURPOSE:To produce an aluminum nitride sintered body while almost preventing the occurrence of irregular color and uneven sintering. CONSTITUTION:An aluminum nitride molded body contg. an yttrium compd. by 0.01-15 pts.wt. (expressed in terms of yttrium oxide) per 100 pts.wt. aluminum nitride is prepd. Nonoxidizing gas having <=-30 deg.C dew point is introduced into a furnace made of a material contg. at least carbon and the aluminum nitride molded body is sintered in the furnace.