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发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH0513333(A)
申请公布日期
1993.01.22
申请号
JP19910163274
申请日期
1991.07.04
申请人
NEC CORP
发明人
KATO HIROSHI
分类号
H01L21/203;H01L21/3205;H05H1/30;H05H1/46
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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