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发明名称
METHOD FOR DETECTING SHORT-CIRCUIT OF INTERHIERARCHY WIRING FOR LAYOUT DATA
摘要
申请公布号
JPH0513540(A)
申请公布日期
1993.01.22
申请号
JP19910164828
申请日期
1991.07.05
申请人
NEC IC MICROCOMPUT SYST LTD
发明人
SHIMOJI SUSUMU
分类号
H01L21/66;G06F17/50
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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