MODULAR SEMICONDUCTOR WAFER TRANSPORT AND PROCESSING SYSTEM,申请号EP19870903076-传众专利搜索

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发明名称	MODULAR SEMICONDUCTOR WAFER TRANSPORT AND PROCESSING SYSTEM
摘要
申请公布号	EP0267233(B1)	申请公布日期	1993.01.07
申请号	EP19870903076	申请日期	1987.04.06
申请人	VARIAN ASSOCIATES, INC.	发明人	STARK, LAWRENCE, R.;TURNER, FREDERICK
分类号	B65G1/06;B65G47/91;C23C14/56;H01L21/677	主分类号	B65G1/06
代理机构		代理人
主权项
地址

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