VERFAHREN ZUR IN-SITU-HERSTELLUNG EINER SCHUTZSCHICHT AUF PHOTOLACK FUER PLASMAAETZEN.,申请号DE19863686092T-传众专利搜索

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发明名称	VERFAHREN ZUR IN-SITU-HERSTELLUNG EINER SCHUTZSCHICHT AUF PHOTOLACK FUER PLASMAAETZEN.
摘要
申请公布号	DE3686092(T2)	申请公布日期	1993.01.07
申请号	DE19863686092T	申请日期	1986.05.19
申请人	APPLIED MATERIALS, INC., SANTA CLARA, CALIF., US	发明人	TAM, SIMON WOOD, SAN FRANCISCO CALIFORNIA 94121, US;WONG, JERRY YUEN KUI, UNION CITY CALIFORNIA 94587, US;READE, RONALD PAUL, PALO ALTO CALIFORNIA 94360, US;WANG, DAVID NIN-KOU, CUPERTINO CALIFORNIA 95014, US
分类号	C30B33/12;C23F1/00;C23F4/00;C30B33/00;G03F7/40;H01L21/308;H01L21/3105;H01L21/311;(IPC1-7):H01L21/31;G03F7/26;H01L21/306	主分类号	C30B33/12
代理机构		代理人
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