| 摘要 |
<p>PURPOSE:To easily take out wafers, after exposure, from a glass mask. CONSTITUTION:A glass mask and a wafer can be removed easily by providing a venthole 4 in a patternless area wherein a wafer is adhesively attached to a glass mask 2 on which a chip 2 is arranged in a circular form. After the exposure, the wafer can be removed easily from the glass mask and deterioration of glass mask can be prevented effectively.</p> |
