| 摘要 |
<p>PURPOSE:To strengthen the part of a stress concentration existing in a crystalline elastic body by making amorphous the boundary part between a fixed part and an elastic deformation part by ion implantation and by preventing occurrence of cleavage thereby substantially. CONSTITUTION:In a crystalline elastic body formed monolithically of a crystalline material, stress concentration occurs in deformation in the boundary part between a fixed part and an elastic deformation part. When this boundary part is made amorphous, a face easy to cleave, which exists in a crystal, is removed. In an accelerometer, a beam 32 is the elastic deformation part while a frame 30 and a mass body 31 are the fixed parts. When the accelerometer receives acceleration and the beam 32 is bent, the boundary parts 34a and 34b are subjected to large stress concentration. Therefore, ion implantation is applied to the parts 34a and 34b so as to destruct the crystal structure of the parts, and thereby the parts are made amorphous. In order to make the crystal amorphous from the surface to the inside without fail, it is desirable to execute the ion implantation by a variety of incident energies.</p> |
