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发明名称
FABRICATION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04336466(A)
申请公布日期
1992.11.24
申请号
JP19910107619
申请日期
1991.05.13
申请人
MATSUSHITA ELECTRON CORP
发明人
SAKURAI KOJI
分类号
H01L21/28;H01L29/423;H01L29/43;H01L29/49;H01L29/78
主分类号
H01L21/28
代理机构
代理人
主权项
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