CHARGED PARTICLE BEAM DEVICE,申请号JP19920033521-传众专利搜索

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发明名称	CHARGED PARTICLE BEAM DEVICE
摘要
申请公布号	JPH04328232(A)	申请公布日期	1992.11.17
申请号	JP19920033521	申请日期	1992.02.20
申请人	PHILIPS GLOEILAMPENFAB:NV	发明人	KARERU DEIIDERITSUKU FUAN DERU MASUTO;ARAN FURANKU DE YONFU
分类号	G21K5/04;G01Q30/02;H01J37/153;H01J37/26	主分类号	G21K5/04
代理机构		代理人
主权项
地址

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