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发明名称
VACUUM VAPOR DEPOSITION APPARATUS
摘要
申请公布号
AU631074(B2)
申请公布日期
1992.11.12
申请号
AU19910083486
申请日期
1991.08.29
申请人
MITSUBISHI JUKOGYO KABUSHIKI KAISHA
发明人
KENICHI YANAGI;TOSHIO TAGUCHI;YOSHITERU MORIYAMA;MITSUHIKO SAKO;TAKUYA AIKO;SHINJI KAMURA;HEISABURO FURUKAWA;KENJI ATARASHIYA;SEIJI YOKORO
分类号
C23C14/24;C23C14/56
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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