BACKING PLATE FOR SPUTTERING DEVICE,申请号JP19910082487-传众专利搜索

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发明名称	BACKING PLATE FOR SPUTTERING DEVICE
摘要
申请公布号	JPH04314857(A)	申请公布日期	1992.11.06
申请号	JP19910082487	申请日期	1991.04.15
申请人	MITSUBISHI KASEI CORP	发明人	NISHINO MITSUAKI;SUGIMOTO KENJI;MIWA TAIICHIRO
分类号	C23C14/34	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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