VAKUUM-SIGNALDURCHFUEHRUNG

摘要

The control unit used in modern comb electron-beam projectors to produce a large number of electron beams which can be individually blanked off consists of an aperture diaphragm and a deflecting plate with over 1000 microcapacitors (MC). The signals needed to operate the control unit must be conducted through a very small area in the chamber wall (CW) into the vacuum and to the microcapacitors (MC) used for deflecting the electron beams. This is achieved with the aid of a printed circuit board (PCB) secured in a vacuum-proof manner and protruding into the chamber, or a multilayer board. A flange (FL) fixed to the chamber wall (CW), and in which the printed circuit board (PCB) is hermetically sealed, is particularly suitable as a support.