发明名称 |
Method of detecting minute gas component in ambience and applied devices. |
摘要 |
<p>To provide a method of environment monitor capable of detecting a minute gas component for monitoring an ambience, and various systems including a gas detector (1). According to the present invention, a method and various systems using the same method are provided in which a sensor for applying an ultrasonic vibration to a thin film (4) formed on a piezoelectric substrate (2) to measure the frequency change of a surface acoustic wave is used to detect a minute gas with high sensitivity. The change of a material in an ambience can be measure by use of this gas sensor. <IMAGE></p> |
申请公布号 |
EP0509328(A2) |
申请公布日期 |
1992.10.21 |
申请号 |
EP19920105687 |
申请日期 |
1992.04.02 |
申请人 |
HITACHI, LTD. |
发明人 |
ARAI, YUKO;HONDA, TAKASHI;OHNAKA, NORIYUKI |
分类号 |
G01N5/02;G01N29/02 |
主分类号 |
G01N5/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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