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发明名称
摘要
申请公布号	JPH0465528(B2)	申请公布日期	1992.10.20
申请号	JP19820157023	申请日期	1982.09.09
申请人	TOKYO SHIBAURA ELECTRIC CO	发明人	SASAKI HAJIME
分类号	H01L21/76;H01L21/225;H01L21/331;H01L21/762;H01L29/06;H01L29/73	主分类号	H01L21/76
代理机构		代理人
主权项
地址

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