| 摘要 |
<p>PURPOSE:To prevent the breakage of an Si sensor chip due to the no formation of a vacuum chamber above a cap. CONSTITUTION:The upper part of a cap is formed into a recessed shape to make the structural deformation of the cap 1 hard to generate. The cap 1 is not deformed by the thermal expansion of the oil 7 sealed in the space formed by the cap 1 and a header 2 and no vacuum chamber is formed above the cap 1 when the oil 7 is again cooled and the breakage of the Si sensor chip 3 provided in the same space can be prevented.</p> |
