| 摘要 |
A method of fabricating an integral filter on a substrate includes: blanket depositing a base layer of a metallic material on a planar surface of the substrate; depositing a patternable material layer over the base layer of metallic material; patterning a plurality of grid lines in the paternable material layer to form a filter pattern; depositing metallic material in the grid lines of the filter pattern by electroplating, to form a filter over the base layer; removing the patternable material layer from the planar surface; and removing the base layer of metallic material at least between the grid lines of the electroplated filter. Preferably, the substrate is part of a fluid handling device, and therefore, includes a through-hole over which the filter is fabricated. Usually, the filter is fabricated prior to forming the through-hole. In one example, the fluid-handling device is a channel plate for a thermal ink jet printhead.
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