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发明名称
MAGNETRON-KATHODENZERSTAEUBUNGSVORRICHTUNG, VERSEHEN MIT SEPARATEN MAGNETISCHEN EINSCHLUSSFELDERN ZUR TARGETTRENNUNG UND MIT EINER DURCH RADIOFREQUENZ VERSTAERKTEN POLARISIERUNG.
摘要
申请公布号
DE3686640(D1)
申请公布日期
1992.10.08
申请号
DE19863686640
申请日期
1986.12.18
申请人
VARIAN ASSOCIATES, INC., PALO ALTO, CALIF., US
发明人
MINTZ, DONALD M., SUNNYVALE CALIFORNIA, US
分类号
C23C14/36;C23C14/34;C23C14/35;C23C14/54;H01J37/34;H01L21/203;H01L21/285;H01L21/31;(IPC1-7):H01J37/34
主分类号
C23C14/36
代理机构
代理人
主权项
地址
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