| 摘要 |
PURPOSE:To obtain durability of a multilayer antireflection film against detergent or disinfectant so that the film can be applied to optical glass lenses used for medical apparatus such as endoscope, etc. CONSTITUTION:The outermost layer in contact with air consists of ZrO2, Ta2O2, TiO2, or mixture of these formed by ion plating method. As for a five-layer antireflection film, for example, the first, third, and fifth layers from the substrate side consist of ZrO2, Ta2O5, TiO2, or mixture of these formed by ion plating. The second and forth layers are made of MgF2. Namely, this method of film forming gives a film material having a chemically stable outermost layer with high packing rate and improves the packing rate. |
