MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE,申请号JP19910040397-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号	JPH04278541(A)	申请公布日期	1992.10.05
申请号	JP19910040397	申请日期	1991.03.07
申请人	NEC CORP	发明人	MIKAGI IKU
分类号	H01L21/28;H01L21/318;H01L21/3205;H01L23/52	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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