发明名称 SEALING DEVICE
摘要 PURPOSE:To obtain a sealing device which is provided with a sealing section which can withstand a high temperature, can be used for such high-quality sealing that the sealing is subject to a low tightening force and does not allow gas discharge, and can prevent the inside of a container from being contaminated by components contained in the air. CONSTITUTION:This sealing device is used for sealing the joint of the flange sections 2 and 4 of a container which is evacuated to a prescribed pressure. Metallic O-rings 7 and 8 which are surface-treated in different ways are respectively put in mounting grooves 5 and 6 provided on the inside and outside of the joint of the flange sections 2 and 4 and the space between the rings 7 and 8 is evacuated to a vacuum.
申请公布号 JPH04269822(A) 申请公布日期 1992.09.25
申请号 JP19910053099 申请日期 1991.02.26
申请人 TOKYO ELECTRON SAGAMI LTD 发明人 SEKIZUKA HIROSHI
分类号 C23C16/44;F16J15/00;F27D7/06;H01L21/00;H01L21/205;H01L21/22;H01L21/265;H01L21/285;H01L21/302;H01L21/3065;H01L21/31 主分类号 C23C16/44
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