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发明名称
ION IMPLANTATION DEVICE
摘要
申请公布号
JPH04254581(A)
申请公布日期
1992.09.09
申请号
JP19910036692
申请日期
1991.02.05
申请人
NISSIN ELECTRIC CO LTD
发明人
KONISHI MASASHI;FUJIWARA SHUICHI;ONODA MASATOSHI;MATSUNAGA KOJI
分类号
C23C14/46;C23C14/48;C23C14/56
主分类号
C23C14/46
代理机构
代理人
主权项
地址
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