DRY ETCHING,申请号JP19910025568-传众专利搜索

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发明名称	DRY ETCHING
摘要
申请公布号	JPH04250623(A)	申请公布日期	1992.09.07
申请号	JP19910025568	申请日期	1991.01.25
申请人	SONY CORP	发明人	KADOMURA SHINGO;MUROYAMA MASAKAZU
分类号	H01L21/302;H01L21/3065;H01L21/3105;H01L21/311;H01L21/321;H01L21/768	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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