| 摘要 |
PURPOSE: To obtain a large deflection in a first vibration direction and eliminate a lateral deflection causing interference signals, by constituting a vibrating body as a web suspended at one or both sides and mounting a structure element in parallel to a primary surface of a supporting body. CONSTITUTION: The sensor element is constituted of a disk-like supporting body 10 in the shape of a double tuning fork. One of tuning fork structures is composed of a vibrating body 13 which is coupled on both sides to the supporting body 10 via four webs 14. The vibrating body 13 is oscillated in a first vibration direction which is shown by an arrow 1 and present within the plane of the supporting body. The oscillation is performed, e.g. electrostatically, electrodynamically or thermoelectrically. A structure element 21 formed as a tongue piece is set to the vibrating body 13 via a suspending web 23. The element 21 can be deflected perpendicularly to a surface of the supporting body 10, and therefore a perpendicular acceleration to the surface of the supporting body is detected by the element 21. |
