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发明名称
THIN FILM FORMING DEVICE
摘要
申请公布号
JPH04221061(A)
申请公布日期
1992.08.11
申请号
JP19900413497
申请日期
1990.12.21
申请人
RICOH CO LTD;RIKOO KOUGAKU KK
发明人
NAKAZAWA MASASHI;OTA WASABURO;SHINOZUKA MICHIAKI;ISHIYAMA MASAAKI;ONODERA YUJI
分类号
C23C14/22;C23C14/24;C23C14/50;G11B7/26;G11B11/10
主分类号
C23C14/22
代理机构
代理人
主权项
地址
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