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发明名称
BOAT FOR EPITAXIALLY GROWING SEMICONDUCTOR IN LIQUID-PHASE
摘要
申请公布号
JPH04219926(A)
申请公布日期
1992.08.11
申请号
JP19900411697
申请日期
1990.12.19
申请人
SUMITOMO ELECTRIC IND LTD
发明人
INOGUCHI YASUHIRO
分类号
H01L21/208
主分类号
H01L21/208
代理机构
代理人
主权项
地址
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