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发明名称
WAFER SUPPORT DEVICE
摘要
申请公布号
JPH04207022(A)
申请公布日期
1992.07.29
申请号
JP19900339638
申请日期
1990.11.30
申请人
TEKUNISUKO:KK
发明人
YOSHIOKA TOYOKICHI
分类号
H01L21/285;H01L21/205;H01L21/22;H01L21/31
主分类号
H01L21/285
代理机构
代理人
主权项
地址
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