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发明名称
摘要
申请公布号
JPH0479432(U)
申请公布日期
1992.07.10
申请号
JP19900110348U
申请日期
1990.10.22
申请人
发明人
分类号
H01L21/66;B65G59/06;G01R31/26;H01L21/673;H01L21/677;H01L21/68;H05K13/00;(IPC1-7):H01L21/66
主分类号
H01L21/66
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