摘要 |
PURPOSE:To simplify the structure of a detector and to reduce the cost thereof by respectively taking out signals from both end parts of the respective conductors constituting the detector. CONSTITUTION:The metal wires 2 constituting a detector are provided to the flat surface of a substrate 1 at equal or different intervals in a mutually parallel state. The positive charges generated in the wires 2 and moved to both ends of the wires 2 in a divided state are respectively inputted to a charge integrating type amplifier 3 from both end parts of the wires 2 and subsequently amplified by a signal amplifier 5 through an analogue multiplexer 4 to be inputted to a signal analyzing/display device 6. Subsequently, the signal analyzing/display device 6 calculates the ratio of the pulse peaks or pulse area values of the signals obtained from both ends parts of the wires 2 at every wires 2 to calculate the passing position of the center of gravity of beam in the axial direction parallel to the wires 2. Further, the pulse peaks or pulse area values are added to take a ratio between the respective wires 2 to calculate the passing position of the center of gravity of beam in the axial direction vertical to the wires.
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