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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH04188863(A)
申请公布日期
1992.07.07
申请号
JP19900318917
申请日期
1990.11.22
申请人
MITSUBISHI ELECTRIC CORP
发明人
MUKOGAWA YASUKAZU
分类号
H01L27/00;H01L21/02
主分类号
H01L27/00
代理机构
代理人
主权项
地址
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