| 摘要 |
PURPOSE:To regulate the fitting position and fitting posture of the member to be polished easily and with a high accuracy, by adequately setting each insertion quantities of two members for driving, bend-deforming and twist- deforming a movable part elastically, and making the height and inclination of the member to be polished adjustable. CONSTITUTION:A member 6 to be polished is fixed(e.g. bonded) to a movable plate 3 without its fixing(e.g. bonding) to a sample base 1, directly, and this movable plate 3 is fitted to a fixed plate 2. Then the movable plate 3 fixed with the member 6 to be polished is adjusted at its fitting state, even in the height direction and inclination direction, by two members 5a, 15 for driving, to the fixed plate 2, the member 6 to be polished is positioned, also the misregistration of the case of removing a driving external force is prevented. Consequently the height and inclination of the face to be polished can be adjusted, on each member 6 to be polished which are fixed to each movable plate 3. |
