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发明名称
MULTI-AXIS INPUT DEVICE OF SEMICONDUCTOR THREE-AXIS STRESS SENSOR
摘要
申请公布号
JPH04143626(A)
申请公布日期
1992.05.18
申请号
JP19900267599
申请日期
1990.10.05
申请人
ENPLAS CORP
发明人
KAJIWARA YASUSHI
分类号
G01L1/00;G01L1/02;G01L5/16;G01L9/00;G01L9/04;H01L29/84
主分类号
G01L1/00
代理机构
代理人
主权项
地址
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